A hybrid solution of non-uniform planar-type inductively coupled plasma-heating problem

Author: Yoon N.S.   Park B.H.   Kim J.H.   Shin Y.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 293-297

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Abstract