Thickness and optical constant distributions of PECVD a-SiC x :H thin films along electrode radial direction

Author： Akaoglu B.   Atilgan I.   Katircioglu B.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.437, Iss.1, 2003-08, pp. : 257-265

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