Bias frequency, waveform and duty-cycle effects on the bias-enhanced nucleation of epitaxial diamond

Author: Wolter S.D.   Okuzumi F.   Prater J.T.   Sitar Z.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.440, Iss.1, 2003-09, pp. : 145-151

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Abstract