Equipment, materials and processes: a review of high rate sputtering technology for glass coating

Author: Nadel S.J.   Greene P.   Rietzel J.   Strumpfel J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.442, Iss.1, 2003-10, pp. : 11-14

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Abstract