Controlling the quality of thin films by surface acoustic waves

Author: Schneider D.   Schwarz T.   Bradford A.S.   Shan Q.   Dewhurst R.J.  

Publisher: Elsevier

ISSN: 0041-624X

Source: Ultrasonics, Vol.35, Iss.5, 1997-08, pp. : 345-356

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Abstract