Experimental and simulated XPS depth profiles of low-energy high dose nitrogen implanted into aluminium

Author： Sullivan J.L. Saied S.O. Wronski Z. Sielanko J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.46, Iss.11, 1995-11, pp. : 1333-1335

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