High-temperature-annealing effects on the electrical properties of RF sputtered SnO 2 thin films for microelectronic sensors

Author： Andreev S.K.   Popova L.I.   Gueorguiev V.K.   Manolov E.B.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.11, 1996-11, pp. : 1325-1328

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Influence of Annealing Temperature on Structural, Morphological, Optical and Electrical Properties of Sol-Gel SnO2 Thin Films

By  

Journal of Nano Research, Vol. 2018, Iss. 52, 2018-07 ,pp. : 15-20

Trans Tech Publications

Access to resources Recommend Favorite

Properties and mechanism study of Ag doped SnO 2 thin films as H 2 S sensors

By Liu C.H.   Zhang L.   He Y.-J.  

Thin Solid Films, Vol. 304, Iss. 1, 1997-07 ,pp. : 13-15

Elsevier

Access to resources Recommend Favorite

Young's modulus of RF-sputtered amorphous thin films in the SiO 2 -Y 2 O 3 system at high temperature

By Shinoda T.   Soga N.   Hanada T.   Tanabe S.  

Thin Solid Films, Vol. 293, Iss. 1, 1997-01 ,pp. : 144-148

Elsevier

Access to resources Recommend Favorite

Effect of low energy oxygen ion beam on optical and electrical characteristics of dual ion beam sputtered SnO 2 thin films

By Chung J.-H.   Choe Y.-S.   Kim D.-S.  

Thin Solid Films, Vol. 349, Iss. 1, 1999-07 ,pp. : 126-129

Elsevier

Access to resources Recommend Favorite

Effect of Al doping on structural, optical and electrical properties of SnO2 thin films synthesized by pulsed laser deposition

By Sinha S.K.   Ray S.K.   Manna I.  

Philosophical Magazine, Vol. 94, Iss. 31, 2014-11 ,pp. : 3507-3521

Taylor & Francis Ltd

Access to resources Recommend Favorite