Dielectric properties of TiO 2 -films reactively sputtered from Ti in an RF magnetron

Author: Alexandrov P.   Koprinarova J.   Todorov D.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.11, 1996-11, pp. : 1333-1336

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Abstract