Low-permittivity evaporated polymer-polyimide

Author: Spassova E.   Jivkov I.   Danev G.   Dimitrova T.   Koprinarova J.   Paskaleva A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.11, 1996-11, pp. : 1345-1346

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Abstract