The helicoid multi-groove molecular and the turbomolecular vacuum pumps in molecular state under the scope of statistical behavior of molecules

Author： Valamontes E.S.   Panos C.N.   Antonlou A.G.   Valamontes S.E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.11, 1996-11, pp. : 1361-1370

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