Determination of stress of DLC films from below band gap optical absorption measurements

Author: Basu M.   Dutta J.   Chaudhuri S.   Nakayama M.   Pal A.K.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.3, 1996-03, pp. : 233-238

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Abstract