Leak rate calibration with gas flow standard apparatus

Author: Dixin Z.   Shiliang L.   Detian L.   Yang M.   Oiang L.   Wangkui L.   Qiang L.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 515-517

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Abstract