Improvement of the performance of the ionization gauge with energy filter for the measurement of an extremely high vacuum

Author： Akimichi H. Tanaka T. Takeuchi K. Tuzi Y. Takahashi N. Arakawa I.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 561-565

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