Effects of small misalignment of electrodes in a cascade static lens gauge studied by computer simulation

Author: Man-ei K.   Urano T.   Hongo S.   Kanaji T.   Nakamura S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 579-582

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Abstract