Development of XHV, vibration-free cryopump

Author: Shiokawa Y.   Ichikawa M.   Kikuchi T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 803-805

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract