'All-dry' and in situ microstructuring of carbide/polyimide layers

Author: Danev G.   Spassova E.   Petkov K.   Assa J.   Wolf-Rottke B.   Ihleman J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.48, Iss.1, 1997-01, pp. : 63-67

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Abstract