Studies of process parameter controlled composition variation in sputtered YBa 2 Cu 3 O 7-x films

Author： Mohan S.   Senthil Nathan S.   Muralidhar G.K.   Mohan Rao G.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.48, Iss.2, 1997-02, pp. : 113-118

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