Analysis of three-dimensional single stage and two-dimensional multistage models of flows in turbomolecular pumps

Author： Schneider T.N.   Katsimichas S.   De Oliveira C.R.E.   Goddard A.J.H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.48, Iss.5, 1997-05, pp. : 449-453

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