Sample rotation and reduced surface roughening in oblique incidence ion sputtering erosion

Author: Carter G.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.49, Iss.4, 1998-04, pp. : 285-295

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract