Decreasing surface outgassing by thin film getter coatings

Author: Benvenuti C.   Chiggiato P.   Cicoira F.   Ruzinov V.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.50, Iss.1, 1998-05, pp. : 57-63

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract