Patterning of cantilevers for power sensor microsystem

Author: Hascik S.   Lalinsky T.   Mozolova Z.   Kuzmik J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.2, 1998-10, pp. : 307-309

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract