Effect of deposition conditions and substrate position on the properties of superconducting YBa 2 Cu 3 O thin films prepared in a facing-target sputtering system

Author： Zeng X.T.   Wong H.K.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.3, 1998-11, pp. : 323-327

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