Uniform growth of compound-semiconductor film over 10inch circle by controlling entrance effects by diffusion mixing between 3 layered flows

Author： Matsumoto K.   Arai T.   Tokunaga H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 699-702

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