A new process for the development of hard and stable sputtered amorphous carbon films

Author: Logothetidis S.   Gioti M.   Charitidis C.   Patsalas P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 61-65

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Abstract