Diagnostics of microwave discharges sustained by propagating surface waves

Author: Kirov K.   Makasheva K.   Shivarova A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.58, Iss.2, 2000-08, pp. : 280-286

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract