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Influence of the substrate temperature on silicon-carbon thin films deposited from SiH 4 and C 2 H 4 by excimer lamp-CVD

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SiC formation and influence on the morphology of polycrystalline silicon thin films on graphite substrates produced by zone melting recrystallization

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XTEM characterization of tungsten implanted SiC thin films on silicon for field emission devices

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