Conductive transparent films deposited by simultaneous sputtering of zinc-oxide and indium-oxide targets

Author: Tominaga K.   Murayama T.   Mori I.   Okamoto T.   Hiruta K.   Moriga T.   Nakabayashi I.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.59, Iss.2, 2000-11, pp. : 546-552

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Abstract