Nitridation of vanadium in molecular nitrogen: a comparison of rapid thermal processing (RTP) and conventional furnace annealing

Author： Galesic I.   Reusch U.   Angelkort C.   Lewalter H.   Berendes A.   Schweda E.   Kolbesen B.O.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.61, Iss.2, 2001-05, pp. : 479-484

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