Investigation of ion implantation for fabrication of p-n junctions with modified silicon surface for photovoltaic devices

Author: Jaroszewicz B.   Slysz W.   Wegrzecki M.   Domanski K.   Grodecki R.   Gawlik G.   Kudla A.   Wrzesinska H.   Gorska M.   Grabiec P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 721-724

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