Influence of high power densities on the composition of pulsed magnetron plasmas

Author： Ehiasarian A.P.   New R.   Munz W.-D.   Hultman L.   Helmersson U.   Kouznetsov V.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.65, Iss.2, 2002-04, pp. : 147-154

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