Fabrication of an array of surface mount device 32.768kHz quartz tuning fork-type crystals: photolithography and selective etching of an array of quartz tuning fork resonators with subsequent photoresist spray coating

Author： Lee S.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.65, Iss.2, 2002-04, pp. : 161-168

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