Characterisation of ZrO 2 films prepared by rf reactive sputtering at different O 2 concentrations in the sputtering gases

By Gao P.   Meng L.J.   dos Santos M.P.   Teixeira V.   Andritschky M.  

Vacuum, Vol. 56, Iss. 2, 2000-02 ,pp. : 143-148

Elsevier

Access to resources Recommend Favorite

Growth of nitrogen stabilised cubic ZrO 2 phase by reactive magnetron sputtering using two reactive gases

By Collard S.   Kupfer H.   Hoyer W.   Hecht G.  

Vacuum, Vol. 55, Iss. 2, 1999-11 ,pp. : 153-157

Elsevier

Access to resources Recommend Favorite

Deposition and structural characterization of ZrO 2 and yttria-stabilized ZrO 2 films by chemical vapor deposition

By Kim J.S.   Marzouk H.A.   Reucroft P.J.  

Thin Solid Films, Vol. 254, Iss. 1, 1995-01 ,pp. : 33-38

Elsevier

Access to resources Recommend Favorite

Relation between the flux of energetic oxygen ions and the sputtered metal atoms in oxide film deposition by reactive sputtering

By Tominaga K.   Mori I.  

Vacuum, Vol. 59, Iss. 2, 2000-11 ,pp. : 574-580

Elsevier

Access to resources Recommend Favorite

Electronic conductivity of a ZrO 2 thin film as an oxygen sensor

By Tan G.-L.   Wu X.-J.  

Thin Solid Films, Vol. 330, Iss. 2, 1998-09 ,pp. : 59-61

Elsevier

Access to resources Recommend Favorite