What is the difference between catalytic CVD and plasma-enhanced CVD? Gas-phase kinetics and film properties

Author： Masuda A.   Izumi A.   Umemoto H.   Matsumura H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 293-297

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