Author: Ikuno T. Ryu J.-T. Oyama T. Ohkura S. Baek Y.-G. Honda S. Katayama M. Hirao T. Oura K.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.66, Iss.3, 2002-08, pp. : 341-345
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Abstract