Extending the range of pressure generated dynamically up to 100Pa in a calibration chamber pumped by a turbomolecular pump

Author: Stanek F.   Tesar J.   Peksa L.   Gronych T.   Repa P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.3, 2002-09, pp. : 307-310

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Abstract