A W-spacer GOLD TFT with high performance and high reliability

Author: Zan H.W.   Peng D.Z.   Shih P.S.   Chang T.C.   Liu P.T.   Chang C.Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.3, 2002-09, pp. : 595-598

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Abstract