Author： Tomaszewski H. Poelman H. Depla D. Poelman D. De Gryse R. Fiermans L. Reyniers M.-F. Heynderickx G. Marin G.B.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.68, Iss.1, 2002-10, pp. : 31-38
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