AES depth profiling of thermally treated Al/Si thin-film structures

Author: Zalar A.   Wang J.Y.   Zhao Y.H.   Mittemeijer E.J.   Panjan P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.71, Iss.1, 2003-05, pp. : 11-17

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Abstract