Experimental determination of electron inelastic scattering cross-sections in Si, Ge and III-V semiconductors

Author: Orosz G.T.   Gergely G.   Gurban S.   Menyhard M.   Toth J.   Varga D.   Tougaard S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.71, Iss.1, 2003-05, pp. : 147-152

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