Implementation of the time-modulated process to produce diamond films using microwave-plasma and hot-filament CVD systems

Author: Ali N.   Fan Q.H.   Kousar Y.   Ahmed W.   Gracio J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.71, Iss.4, 2003-07, pp. : 445-450

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Abstract