An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

Author: Yang Shih-Wei   Lin Chern-Sheng   Lin Shir-Kuan   Fu Shu-Hsien   Yeh Mau-Shiun  

Publisher: Emerald Group Publishing Ltd

ISSN: 0144-5154

Source: Assembly Automation, Vol.33, Iss.1, 2013-02, pp. : 57-67

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Abstract