Diagnosis of Active Species in Reactive Acetylene Plasma by Laser-Ionization Molecular-Beam Time-of-Flight Mass Spectrometry

Author： Feng Chunlei  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.31, Iss.3, 2011-06, pp. : 405-415

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