A comparative study on the microstructure and tribological properties of Si 3 N 4 and TiN films produced by the IBED method

Author： Zhuang D.-M.   Liu J.-J.   Zhu B.-L.   Li W.-Z.   Zhang X.-S.   Yang S.-R.  

Publisher： Elsevier

ISSN： 0301-679X

Source： Tribology International, Vol.29, Iss.6, 1996-01, pp. : 507-513

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