Two-dimensional, electrostatic finite element study of tip-substrate interactions in electric force microscopy of high density interconnect structures

Author： Gross T.S.   Prindle C.M.   Chamberlin K.   bin Kamsah N.   Wu Y.  

Publisher： Elsevier

ISSN： 0304-3991

Source： Ultramicroscopy, Vol.87, Iss.3, 2001-04, pp. : 147-154

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