Electron energy-loss spectroscopic profiling of thin film structures: 0.39nm line resolution and 0.04eV precision measurement of near-edge structure shifts at interfaces

Author: Walther T.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.96, Iss.3, 2003-09, pp. : 401-411

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Abstract