Estimating phase errors in heterodyne laser interferometer measurement systems

Author: Grishin S.  

Publisher: Springer Publishing Company

ISSN: 0543-1972

Source: Measurement Techniques, Vol.54, Iss.8, 2011-10, pp. : 865-868

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Abstract

An approach is described for estimating the phase error owing to frequency fluctuations of the laser radiation in laser heterodyne interference measurement systems.