Infrared and Raman spectroscopic investigation of thin films of AlN and SiC on Si substrates

Author: Hobert H.   Dunken H.H.   Meinschien J.   Stafast H.  

Publisher: Elsevier

ISSN: 0924-2031

Source: Vibrational Spectroscopy, Vol.19, Iss.2, 1999-04, pp. : 205-211

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