Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Author: Chen Qi  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.14, Iss.6, 2008-06, pp. : 739-746

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract