Self-Organization and Dynamics of Nanoparticles in Chemically Active Plasmas for Low-Temperature Deposition of Silicon and Carbon-Based Nanostructured Films

Author： Vladimirov S.V.  

Publisher： Springer Publishing Company

ISSN： 1084-0184

Source： Plasmas and Polymers, Vol.8, Iss.2, 2003-06, pp. : 135-152

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