High-rate sputtering of thick PZT thin films for MEMS

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Journal of Electroceramics, Vol. 25, Iss. 2-4, 2010-10 ,pp. : 198-202

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Investigation of top electrode for PZT thick films based MEMS sensors

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PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS

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Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators

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Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

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Journal of Electroceramics, Vol. 17, Iss. 2-4, 2006-12 ,pp. : 565-572

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